9 Institutskii per.,
Dolgoprudny, Moscow region
Contacts


International workshop Atomic Layer Deposition Russia 2015 (ALD Russia 2015)

Dear participents, pictures taken from the Workshop are now available here.

ALD Russia 2015 will be held in the BioPharmCluster building of MIPT, room №107.

Dear participants of ALD Russia 2015, the detailed instruction regarding the forthcoming event  is now available. Here you can also download these instructions in Russian.

Dear participants of ALD Russia 2015, the updated version of Technical Program is now available.

The first announcement of ALD Russia 2015 can be downloaded here.

Сonference subjects

  • Precursors and Chemistry
  • Growth and Characterization
  • Memory Applications

Organizers

Anatoly Malygin

Doctor of science , professor of St. Petersburg Technological University, Russia

Anatoly Malygin received the Doctoral degree in physics from the St. Petersburg Technological University in 1991 and diploma of Professor in 1995.

He is currently a Professor at St. Petersburg Technological University and his current research interests related to the solid state physics and chemical transitions of solid materials based on the Aleskovskii’s theory which was at the origins of scientific principles of Atomic Layer Deposition (ALD). He is focused mainly on the ALD process development and scientific principles of nanomaterials formation for the wide range of applications.

Anatoly Malygin is the author and co-author of more than 600 publications.


  • Steven M. George, University of Colorado at Boulder, USA
  • Riikka Puurunen, VTT, Finland
  • V.A. Gritsenko, Rzhanov Institute of Semiconductor Physics SB RAS
  • Cheol Seong Hwang, Seoul National University, Korea
  • Giovanna Scarel, James Medison University, USA
  • Erwin Kessels, Eindhoven University of Technology, Netherlands
  • Robert M. Wallace, University of Texas at Dallas, USA
  • Ingo Dirnstorfer, Namlab, Germany
  • Annelies Delabie, IMEC, Belgium
  • N.B. Morozova, A.V. Nikolaev Institute of Inorganic Chemistry, Russia
  • V.Yu. Vasiliev, Novosibirsk state technical university and SibIS LLC, Russia
  • Sabina Spiga, CNR-IMM-MDM, Italy
  • Gregory N. Parsons, North Carolina State University, USA
  • Sean Barry, Carleton University, Canada
  • Evgeni Gornev, SRIME, Russia
  • Hyungjun Kim, Yonsei University, Korea 
  • Andrey Markeev, MIPT, Russia
  • Andrey Zenkevich, MIPT, Russia
  • Anna Chernikova, MIPT, Russia
  • Ludmila Razumovskaya, MIPT, Russia

Housing and travel

Travel Information
Housing in Dolgoprudny (21-22 seP.)
Housing in Moscow (23 sep.)
Russian visa
About Dolgoprudny
About Moscow


Copyright © 2015-2023

Moscow Institute of Physics and Technology
Сделано в веб-студии “ВВЕРХ.biz