9 Institutskii per.,
Dolgoprudny, Moscow region


  1. Chernikova A.,  Kozodaev M.,  Markeev A., Negrov D., Spiridonov M.,  Zarubin S, Bak O., Buragohain P., Lu H., Suvorova E.,  Gruverman A. ,  Zenkevich A. "Ultrathin Hf0.5Zr0.5O2 Ferroelectric Films on Si" ACS Applied Materials and Interfaces Volume 8, Issue 11, 30 March 2016, Pages 7232-7237

  2. Chernikova A.G., Kuzmichev D.S., Negrov D.V., Kozodaev M.G., Polyakov S.N., Markeev A.M. "Ferroelectric properties of full plasma-enhanced ALD TiN/La:HfO2/TiN stacks" Applied Physics Letters Volume 108, Issue 24, 13 June 2016

  3. Orlov O.M.,Markeev A.M.,  Zenkevich A.V.,  Chernikova A.G.,  Spiridonov M.V.,  Izmaylov R.A., Gornev E.S. "Investigation of the properties and manufacturing features of nonvolatile FRAM memory based on atomic layer deposition" Russian Microelectronics Volume 45, Issue 4, 1 July 2016, Pages 262-269

  4. Sergei Zarubin, Elena Suvorova, Maksim Spiridonov, Dmitrii Negrov, Anna Chernikova, Andrey Markeev, and Andrei Zenkevich. "Fully ALD-grown TiN/Hf0.5Zr0.5O2/TiN stacks: Ferroelectric and structural properties" Applied Physics Letters Volume 109, Issue 19, 8 November 2016

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