9 Institutskii per.,
Dolgoprudny, Moscow region
Contacts


2010-2014

2014


  1. Matveyev Yu.A., Markeev A.M., Lebedinskii Yu.Yu., Chouprik A.A., Egorov K.V., Drube W., Zenkevich A.V., "Resistive switching effect in HfxAl1-xOy with a graded Al depth profile studied by hard X-ray photoelectron spectroscopy" Thin Solid Films Volume 563, 31 July 2014, Pages 20-23

2013


  1. A.Markeev, A.Chouprik, K.Egorov, Yu.Lebedinskii, A.Zenkevich and O.Orlov. "Multilevel resistive switching in ternary HfxAl1-xOy oxide with graded Al depth profile". Microelectronic Engineering, 2013.

  2. Andrey M.Markeev, Anna G.Chernikova, Anastasya A.Chouprik, Sergey A.Zaitsev, Dmitry V.Ovchinnikov, Holger Althues, and Susanne Dorfler. "Atomic layer deposition of Al2O3 and AlxTi1-xOy thin films on N2O plasma pretreated carbon materials". J. Vac. Sci. Technol. A 31, 01A135 (2013).

 

 2012


  1. Alekhin A.P., Chouprik A.A., Grigal I.P., Gudkova S.A., Lebedinskii Yu.Yu., Markeev A.M., Zaitsev S.A. "Electrical properties of quaternary HfAlTiO thin films grown by atomic layer deposition". Thin Solid Films 520 (14), 2012, pp.4547-4550.

  2. Grigal I.P., Markeev A.M., Gudkova S.A., Chernikova A.G., Mityaev A.S., Alekhin A.P. "Correlation between bioactivity and structural properties of titanium dioxide coatings grown by atomic layer deposition". Applied Surface Science 258 (8), 2012, pp.3415-3419.

 

2011


  1. Grigal I.P., Alekhin A.P., Markeev A.M., Gudkova S.A., Chernikova A.G., TetyukhinD.V., Kozlov E.N. "Atomic layer deposition of bioactive TiO2 coatings for titanium implants".European Cells and Materials 22 (SUPPL.1), 2011, pp.27.

 

2010


  1. Alekhin A.P., Lapushkin G.I., Markeev A.M., Sigarev A.A., Toknova V.F. "Atomic layer deposition of the titanium dioxide thin film from tetraethoxytitanium and water".Journal of Surface Investigation 4 (3), 2010, pp.379-383.

  2. Alekhin A.P., Gudkova S.A., Markeev A.M., Mitiaev A.S., Sigarev A.A., Toknova V.F. "Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles". Applied Surface Science 257 (1), 2010, pp.186-191.

  3. Alekhin A.P., Boleiko G.M., Gudkova S.A., Markeev A.M., Sigarev A.A., Toknova V.F., Kirilenko A.G., Lapshin R.V., Kozlov E.N., Tetyukhin D.V. "Synthesis of biocompatible surfaces by nanotechnology methods". Nanotechnologies in Russia ,Volume 5, Issue 9-10, 2010, pages 696-708.

  4. Alekhin A.P., Gudkova S.A., MarkeevA.M., Mitiaev A.S., Sigarev A.A., Toknova V.F. "Structural properties of the titanium dioxide thin films grown by atomic layer deposition at various numbers of reaction cycles". Applied Surface Science 257 (1), 2010, pp.186-191


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Moscow Institute of Physics and Technology
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